Ruthenium

Ruthenium, a rare metal from the platinum group metals (PGM), is essential in the display manufacturing industry. It is widely used in thin film electrodes, seed/contact layers, and PVD targets for advanced display technologies. In key processes for OLED, Micro LED, and high-resolution LCD panels, the quality of thin films determines product performance. Ruthenium’s superior conductivity, corrosion resistance, and thermal stability make it ideal for enhancing process reliability and efficiency.


Why Ruthenium is Vital in Display Applications

In next-generation displays with high-density circuits and fine patterns, uniform thin films with minimal contamination are critical. Ruthenium-based materials provide consistent performance, helping manufacturers achieve higher yields and fewer defects. Its stable oxide layer prevents contact corrosion, while high-temperature stability ensures reliability during demanding processes.


When deposited as a thin film, ruthenium ensures strong interfacial adhesion, reducing delamination issues and improving process yields. Even at minimal thickness, it maintains excellent electrical conductivity, lowering power loss in compact circuits. Furthermore, its resistance to plasma and etching processes minimizes contamination, which is essential for long-term equipment performance.


Ruthenium Targets: Quality Requirements and Industrial Standards

Ruthenium materials are primarily supplied as sputtering targets in display manufacturing. These targets must meet strict quality standards, including:

- High purity and low impurities

- Low porosity and uniform density

- Dimensional accuracy and surface quality


Manufacturers ensure these standards through precise processing, inspection, and clean packaging in oxygen-free environments. During procurement, display producers evaluate particle generation, outgassing, and sputtering uniformity—all critical for consistent film deposition.


Supply Chain and Recycling: Strategic Advantages

Like other PGMs, ruthenium faces supply chain risks due to geographically concentrated reserves and refining facilities. Price volatility and availability are ongoing challenges, making long-term supply agreements and diversified sourcing essential strategies for display manufacturers.


Recycling ruthenium targets and sputtering residues plays a major role in cost reduction and sustainability. Recovering high-value PGMs not only ensures supply stability but also supports environmental regulations and ESG compliance. In Europe and the U.S., recycled raw materials and reduced carbon footprints are becoming decisive factors for global competitiveness.




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